Means for locating an ultra-precision positioning of a table

Details Means for locating an ultra-precision positioning of a table Means for locating an ultra-precision positioning of a table

1984-12-14

1986-05-20

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

310328, G21K 510

Patent

active

045903808

ABSTRACT:
This invention relates to means for locating an ultra-precision positioning of a table, in which a rough moving of the table is made by a motor connected to the aforesaid means, while a minute moving thereof is done by a piezoelectric element mounted on a ball screw shaft to be driven by the motor, whereby an ultra-precision positioning of the table can be carried out smoothly. Accordingly, it is unnecessary to dispose a roughly moving table and a minutely moving table separately within a device.

REFERENCES:
patent: 3684904 (1972-08-01), Galutua et al.
patent: 3835338 (1974-09-01), Martin
patent: 3902085 (1975-08-01), Bizzigotii
patent: 4477731 (1984-05-01), Kuni et al.
patent: 4506154 (1985-03-01), Scire

Affiliated with

Also associated with

Rating

Means for locating an ultra-precision positioning of a table does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Means for locating an ultra-precision positioning of a table, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Means for locating an ultra-precision positioning of a table will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2110381