Means for locating an ultra-precision positioning of a table

Details Means for locating an ultra-precision positioning of a table Means for locating an ultra-precision positioning of a table

1985-12-03

1986-08-19

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

310328, G21K 510

Patent

active

046071660

ABSTRACT:
This invention relates to means for locating an ultra-precision positioning of a table, in which a rough moving of the table is made by a motor connected to the aforesaid means, while a minute moving thereof is done by a piezo-electric element mounted on a ball screw shaft to be driven by the motor, whereby an ultra-precision positioning of the table can be carried out smoothly. Accordingly, it is unnecessary to dispose a roughly moving table and a minutely moving table separately within a device.

REFERENCES:
patent: 3684904 (1972-08-01), Galutua et al.
patent: 3835338 (1974-09-01), Martin
patent: 3902085 (1975-08-01), Bizzigotic
patent: 4447731 (1984-05-01), Kumi et al.
patent: 4506154 (1985-03-01), Scire

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