MBE effusion source with asymmetrical heaters

Details MBE effusion source with asymmetrical heaters MBE effusion source with asymmetrical heaters

1992-07-20

1993-10-12

Reynolds, Bruce A.

Industrial electric heating furnaces

Electron beam furnace device

392388, 118726, B05C 1100, C23C 1600, H01L 21203

Patent

active

052532666

ABSTRACT:
An effusion source, for the generation of molecular beams, adapted to be positioned at an angle to the horizontal, within a vacuum chamber, of an MBE system including heating structures around the source to create uniform temperatures across the source in planes substantially parallel to the horizontal to cause uniform temperatures in planes substantially parallel to the horizontal in materials placed within the source and intended for MBE applications. A number of heating embodiments are described.

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patent: 3572672 (1971-03-01), Harel
patent: 3634647 (1972-01-01), Dale, Jr.
patent: 4021769 (1977-05-01), Edin et al.
patent: 4856457 (1989-08-01), Knauer
patent: 5034604 (1991-07-01), Streetman et al.
patent: 5041719 (1991-08-01), Harris et al.
patent: 5140939 (1992-08-01), Valentian
patent: 5142117 (1992-08-01), Hoggatt et al.

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