Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
Reexamination Certificate
2011-01-11
2011-01-11
Souw, Bernard E (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Electron microscope type
C250S306000, C250S307000, C250S310000, C250S492100, C250S492300
Reexamination Certificate
active
07868290
ABSTRACT:
A material processing system for processing a work piece is provided. The material processing is effected by supplying a reactive gas and energetic radiation for activation of the reactive gas to a surrounding of a location of the work piece to be processed. The radiation is preferably provided by an electron microscope. An objective lens of the electron microscope is preferably disposed between a detector of the electron microscope and the work piece. A gas supply arrangement of the material processing system comprises a valve disposed spaced apart from the processing location, a gas volume between the valve and a location of emergence of the reaction gas being small. The gas supply arrangement further comprises a temperature-adjusted, especially cooled reservoir for accommodating a starting material for the reactive gas.
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Hoffrogge Peter
Koops Hans W. P.
Carl Zeiss NTS GmbH
Logie Michael J
Nawotech GmbH
Riter Bruce D.
Souw Bernard E
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