Material loader apparatus and method using a single image recogn

Details Material loader apparatus and method using a single image recogn Material loader apparatus and method using a single image recogn

1998-08-18

2000-12-12

Mehta, Bhavesh

Image analysis

Applications

Manufacturing or product inspection

382153, 901 1, 700245, 348 86, G06K 900

Patent

active

061609056

ABSTRACT:
An apparatus for transferring a wafer carrier is capable of recognizing both a bar code of the wafer carrier and a vision mark for position correction attached to a processing equipment. It is possible to recognize both the bar code and the vision mark using a single image recognition device, by determining a required focal length for a lens in the image recognition device, and by determining the required size of the vision mark. Therefore, a separate bar code reader to recognize the bar code is not required in the processing equipment. This results in a reduced cost and increased productivity, since the processing equipment need not to be shut down for installation of a bar code reader.

REFERENCES:
patent: 5515599 (1996-05-01), Best
Kim et al. "Sensor-based navigation control and calibration of a wafer-handling mobile robot." Industry Applications Conference, 1995, IEEE. v. 3, Oct. 1995. pp. 1922-1929.

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