Material and method of making secondary-electron emitters

Details Material and method of making secondary-electron emitters Material and method of making secondary-electron emitters

1975-08-13

1977-07-26

Padgett, Benjamin R.

Compositions

Electrically conductive or emissive compositions

Free metal containing

75206, H01B 102

Patent

active

040382168

ABSTRACT:
Thick, finely-grained films of cermets are fabricated using conventional techniques of sputtering the ceramic and the metal onto a substrate. The cermet is then subjected to differential sputtering in which the metal is sputtered away faster than the ceramic to leave a ceramic-rich surface layer having excellent secondary-electron-emission properties for low-energy incident electrons. Typical of such cermets are MgO/Au, MgO/Pt and MgO/Ag. The presence of metallic particles in the bulk of the films and the small size of the ceramic particles greatly reduce surface charging while allowing the emitter film to be made thick enough to have a long operating life under adverse device conditions.

REFERENCES:
patent: 3069759 (1962-12-01), Grant et al.
Surface Science, vol. 42, No. 1, Mar., 74, pp. 139-156.

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