Metal working – Barrier layer or semiconductor device making – Barrier layer device making
Patent
1979-03-30
1980-05-13
Lazarus, Richard B.
Metal working
Barrier layer or semiconductor device making
Barrier layer device making
29423, 295272, H01J 914
Patent
active
042020808
ABSTRACT:
A process for producing mass filters for use in mass spectrometers. Several electrodes having precisely shaped surfaces must be held in precisely determined positions with respect to each other. Insulators are placed into position on the surface of a mandrel and a layer of metal is deposited over the mandrel and insulators to form a composite unitary structure, including the electrodes. The deposited metal overlying the insulators is then removed, electrically isolating the electrodes.
REFERENCES:
patent: 2905573 (1959-09-01), Marvin
patent: 2944338 (1960-07-01), Craig
patent: 3419951 (1969-01-01), Carlson
patent: 3533153 (1970-10-01), Melill et al.
Holzl Robert A.
Lawrence, Jr. James L.
Pickett Frederick P.
Lazarus Richard B.
U.T.I.-Spectrotherm Corporation
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