Mass spectrometer and radical measuring method

Details Mass spectrometer and radical measuring method Mass spectrometer and radical measuring method

1996-11-07

1998-04-28

Berman, Jack I.

Radiant energy

Ionic separation or analysis

Methods

250281, 250286, H01J 4926

Patent

active

057447969

ABSTRACT:
In a mass spectrometer, a DC power supply amplifier is additionally provided in a circuit for generating an accelerating voltage of an electron beam for ionizing radicals. A "potential for ionization of radicals" is applied as a reference voltage of the accelerating voltage of the radical ionizing electron beam, and an output signal of the mass spectrometer is measured as a background signal strength. Then, the DC power supply amplifier is controlled to alternately supply the "potential for ionization of radicals" and a "potential slightly lower than a potential for dissociative ionization of parent gas or dissociative ionization of parent radicals", as the accelerating voltage of the radical ionizing electron beam. A difference between the background signal strength and the output signal of the mass spectrometer when the "potential slightly lower than a potential for dissociative ionization of parent gas or dissociative ionization of parent radicals" is applied as the accelerating voltage of the radical ionizing electron beam, reflects the density of radicals.

REFERENCES:
patent: 5015848 (1991-05-01), Bomse et al.
patent: 5340983 (1994-08-01), Deinzer et al.
patent: 5493115 (1996-02-01), Deinzer et al.
Sugai, et al., Journal of Vacuum Science & Technology 10 (1992) Jul./Aug., No. 4, Pt. I, Appearance mass spectrometry of neutral radicals in radio frequency plasmas, pp. 1193-1200.
Kinoshita, et al., LSI Basic Research Lab., Microelectronics Research Labs., NEC Corp., Residence Time Effects on Dissociation in High Density CF.sub.4 Plasma, pp. 104-105.

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