Mass flowmeter

Measuring and testing – Volume or rate of flow – Thermal type

Reexamination Certificate

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Reexamination Certificate

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06945106

ABSTRACT:
A mass flowmeter of the thermal type, having a planar, thin substrate with a sensing surface that can be brought into direct or indirect contact with a flowing fluid during a measurement, wherein electrically controllable heating elements and temperature sensor elements for determining a temperature difference are provided on the sensing surface by a planar technique. The substrate with its sensing surface is present in particular in a cavity of a module into which a feed line and a drain line for the fluid issue.

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patent: 6349596 (2002-02-01), Nakada et al.
patent: 6446504 (2002-09-01), Maginnis, Jr.
patent: 6550325 (2003-04-01), Inushima et al.
patent: 6777961 (2004-08-01), Hamamoto et al.
patent: 2002/0011104 (2002-01-01), Yamakawa et al.
patent: 2002/0043710 (2002-04-01), Mayer et al.
patent: 2003/0056586 (2003-03-01), Ueki et al.
patent: 2003/0115952 (2003-06-01), Mayer et al.
patent: 2004/0025585 (2004-02-01), Seki et al.

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