Mass flow sensor

Details Mass flow sensor Mass flow sensor

1996-07-29

1998-01-06

Dougherty, Elizabeth L.

Measuring and testing

Volume or rate of flow

Thermal type

G01F 168

Patent

active

057057451

ABSTRACT:
In a mass flow sensor having a frame of monocrystalline silicon and a membrane fixed therein, a heating element and, if indicated, temperature-measuring elements are provided on the membrane. A heat-conducting element, which extends from the membrane across the frame, is provided in the edge area of the membrane. The heating element, the heat-conducting element and, if indicated, temperature-measuring elements are patterned out of a single metal layer.

REFERENCES:
patent: 4888988 (1989-12-01), Lee et al.
patent: 5396795 (1995-03-01), Araki
patent: 5406841 (1995-04-01), Kimura

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