Mass flow controller

Details Mass flow controller Mass flow controller

2006-11-07

2006-11-07

Krishnamurthy, Ramesh (Department: 3753)

Fluid handling

Line condition change responsive valves

Pilot or servo controlled

C137S613000, C138S040000, C251S120000, C251S127000

Reexamination Certificate

active

07131456

ABSTRACT:
A mass flow controller includes a base having a passage that allows a fluid to pass through the passage. A first control valve controls a mass flow of a fluid passing through the passage. A second control valve controls a full scale of the mass flow of the fluid. A bypass portion is disposed in the passage through which the fluid passes. A mass flow sensor measures the mass flow of the fluid passing through the bypass portion. The second control valve is connected to the passage adjacent to the bypass portion for controlling the full scale of the mass flow of the fluid passing through the bypass portion.

REFERENCES:
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patent: 6247495 (2001-06-01), Yamamoto et al.
patent: 6889706 (2005-05-01), Fukano et al.
patent: 2004/0261705 (2004-12-01), Kang et al.
patent: 62112710 (1987-07-01), None
patent: 04082706 (1992-09-01), None
patent: 07005929 (1995-01-01), None
English Abstract***.

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