Maskless laser writing of microscopic metallic interconnects

Fishing – trapping – and vermin destroying

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437935, 437245, H01L 21306, H01L 2126

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active

054590981

ABSTRACT:
A method of forming a metal pattern on a substrate. The method includes depositing an insulative nitride film on a substrate and irradiating a laser beam onto the nitride film, thus decomposing the metal nitride into a metal constituent and a gaseous constituent, the metal constituent remaining in the nitride film as a conductive pattern.

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Levy, et al. "Low-Pressure Chemical Vapor Deposition of Wand Al for VLSI Appl." Mat. Res. Soc. Symp. Proc., vol. 71, Apr. 1986, pp. 229-247.
Bernhardt, et al., "Laser Microfabrication Technology and its Applications", Mat. Res. Soc. Symp. Proc., vol. 76, Dec. 1986, pp. 223-234.
Kirk-Othmer Encyclopedia of Chemical Technology, 3rd Edition, vol. 13, John Wiley & Sons, Inc. 1981 pp. 621-648.

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