Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate
2004-05-28
2011-11-15
Kim, Peter B (Department: 2882)
Photocopying
Projection printing and copying cameras
Illumination systems or details
Reexamination Certificate
active
08059261
ABSTRACT:
A lithographic projection apparatus having a masking device for obscuring part of at least one of a patterning device used for patterning a projection beam before imaging the patterned beam onto a substrate. The masking device includes a first masking structure to obscure said part of said patterning device in a first direction and a second masking structure to obscure said part in a second different direction, wherein said first and second masking structure are disposed in the vicinity of said focal plane in a mechanically uncoupled arrangement with respect to each other.
REFERENCES:
patent: 4589769 (1986-05-01), Matsuki
patent: 5390227 (1995-02-01), Mizusawa et al.
patent: 5473410 (1995-12-01), Nishi
patent: 5600698 (1997-02-01), Terashima et al.
patent: 5632942 (1997-05-01), Yeh et al.
patent: 5889758 (1999-03-01), Maehara et al.
patent: 6040893 (2000-03-01), Ebinuma
patent: 6259509 (2001-07-01), Miwa et al.
patent: 6307619 (2001-10-01), Galburt et al.
patent: 6348303 (2002-02-01), Van Der Lei et al.
patent: 6388733 (2002-05-01), Hayashi
patent: 6465797 (2002-10-01), Okunuki
patent: 6597002 (2003-07-01), Kondo
patent: 6806943 (2004-10-01), Barringer et al.
patent: 7066240 (2006-06-01), Dussinger et al.
patent: 2001/0046038 (2001-11-01), Mulkens et al.
patent: 2002/0054283 (2002-05-01), Kato et al.
patent: 2002/0196820 (2002-12-01), Sato et al.
patent: 0 744 663 (1996-11-01), None
patent: 60-45252 (1985-03-01), None
patent: 63-95399 (1988-04-01), None
patent: 2-73618 (1990-03-01), None
patent: 3-11613 (1991-01-01), None
patent: 8-264422 (1996-10-01), None
patent: 10-97989 (1998-04-01), None
patent: 11-67656 (1999-03-01), None
patent: 11-233399 (1999-08-01), None
patent: 2000-68199 (2000-03-01), None
patent: 2000-216079 (2000-08-01), None
patent: 2001-218424 (2001-08-01), None
patent: 2003-017396 (2003-01-01), None
patent: 99/63585 (1999-12-01), None
Excerption from “Semiconductor Memories,” B. Prince, 2ndEdition, Wiley (1991), pp. 9 and 90-91.
European Search Report, dated Jul. 26, 2005.
“European Search Report completed Mar. 26, 2004”.
Molenaar Jacobus Frederik
Pardoel Michel Gerardus
Van Den Hoven Gerbrand Petrus Johannes
Van Eijk Jan
Verdoes Gerardus Johannes
ASML Netherlands B.V.
Kim Peter B
Liu Chia-how Michael
Pillsbury Winthrop Shaw & Pittman LLP
LandOfFree
Masking device, lithographic apparatus, and device... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Masking device, lithographic apparatus, and device..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Masking device, lithographic apparatus, and device... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-4287240