Masking device, lithographic apparatus, and device...

Photocopying – Projection printing and copying cameras – Illumination systems or details

Reexamination Certificate

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Reexamination Certificate

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08059261

ABSTRACT:
A lithographic projection apparatus having a masking device for obscuring part of at least one of a patterning device used for patterning a projection beam before imaging the patterned beam onto a substrate. The masking device includes a first masking structure to obscure said part of said patterning device in a first direction and a second masking structure to obscure said part in a second different direction, wherein said first and second masking structure are disposed in the vicinity of said focal plane in a mechanically uncoupled arrangement with respect to each other.

REFERENCES:
patent: 4589769 (1986-05-01), Matsuki
patent: 5390227 (1995-02-01), Mizusawa et al.
patent: 5473410 (1995-12-01), Nishi
patent: 5600698 (1997-02-01), Terashima et al.
patent: 5632942 (1997-05-01), Yeh et al.
patent: 5889758 (1999-03-01), Maehara et al.
patent: 6040893 (2000-03-01), Ebinuma
patent: 6259509 (2001-07-01), Miwa et al.
patent: 6307619 (2001-10-01), Galburt et al.
patent: 6348303 (2002-02-01), Van Der Lei et al.
patent: 6388733 (2002-05-01), Hayashi
patent: 6465797 (2002-10-01), Okunuki
patent: 6597002 (2003-07-01), Kondo
patent: 6806943 (2004-10-01), Barringer et al.
patent: 7066240 (2006-06-01), Dussinger et al.
patent: 2001/0046038 (2001-11-01), Mulkens et al.
patent: 2002/0054283 (2002-05-01), Kato et al.
patent: 2002/0196820 (2002-12-01), Sato et al.
patent: 0 744 663 (1996-11-01), None
patent: 60-45252 (1985-03-01), None
patent: 63-95399 (1988-04-01), None
patent: 2-73618 (1990-03-01), None
patent: 3-11613 (1991-01-01), None
patent: 8-264422 (1996-10-01), None
patent: 10-97989 (1998-04-01), None
patent: 11-67656 (1999-03-01), None
patent: 11-233399 (1999-08-01), None
patent: 2000-68199 (2000-03-01), None
patent: 2000-216079 (2000-08-01), None
patent: 2001-218424 (2001-08-01), None
patent: 2003-017396 (2003-01-01), None
patent: 99/63585 (1999-12-01), None
Excerption from “Semiconductor Memories,” B. Prince, 2ndEdition, Wiley (1991), pp. 9 and 90-91.
European Search Report, dated Jul. 26, 2005.
“European Search Report completed Mar. 26, 2004”.

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