Mask ring assembly for X-ray lithography

Details Mask ring assembly for X-ray lithography Mask ring assembly for X-ray lithography

1984-01-06

1985-08-06

Schilling, Richard L.

X-ray or gamma ray systems or devices

Specific application

Lithography

2504821, 350318, G03B 1100, G02B 700, G03F 500

Patent

active

045340471

ABSTRACT:
This invention is directed to a mask ring assembly for X-ray lithography which is particularly adapted, among other possible uses, for use in replicating integrated circuit patterns, said assembly including a mask ring, a plurality of kinematic mounts for removably mounting the mask ring on an alignment cartridge, each of the kinematic mounts including a funnel-like shaped seat member and a mating ball-like shaped member, one of said members being on the mask ring and the other of the members being mounted on the alignment cartridge.

REFERENCES:
patent: 3743842 (1973-07-01), Smith et al.
patent: 3892973 (1975-07-01), Coquin et al.
patent: 4037111 (1977-07-01), Coquin et al.
patent: 4085329 (1978-04-01), McCoy et al.
patent: 4185202 (1980-01-01), Dean et al.
patent: 4187431 (1980-02-01), Hundt
patent: 4215192 (1980-07-01), Buckley
patent: 4238682 (1980-12-01), Vratny
patent: 4301237 (1981-11-01), Burns
patent: 4335313 (1982-01-01), Kreuzer et al.

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