Mask pellicle remove tool

Details Mask pellicle remove tool Mask pellicle remove tool

1997-03-07

1999-09-14

Epps, Georgia

Photocopying

Projection printing and copying cameras

Methods

355 74, G03B 27132

Patent

active

059531070

ABSTRACT:
A mask pellicle removal methods for separating a mask pellicle from a glass reticle to which it is bonded by prying against its releasable bond. The methods includes a table support for nesting the glass reticle and for supporting a manually operated prying mechanism having only the necessary degrees of freedom for prying free the mask pellicle without damaging the glass reticle.

REFERENCES:
patent: 4637713 (1987-01-01), Shulenberger et al.
patent: 5311250 (1994-05-01), Suzuki et al.
patent: 5422704 (1995-06-01), Sego

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