Mask holding method, mask and mask chuck, exposure apparatus usi

Details Mask holding method, mask and mask chuck, exposure apparatus usi Mask holding method, mask and mask chuck, exposure apparatus usi

1994-11-17

1996-08-06

Wong, Don

X-ray or gamma ray systems or devices

Specific application

Lithography

378205, 378208, G21K 500

Patent

active

055442137

ABSTRACT:
V-shaped linear groove portions are formed at regular intervals and at three positions (with 120.degree. pitches) on a periphery, concentric with a ring-shaped support frame, of an X-ray mask to extend in the radial direction. On the other hand, corresponding mounts, as projecting portions, each having a spherical leading end are disposed at three positions on a mask chuck. The mask is held on the mask chuck at the three positions by engaging the corresponding V-shaped linear groove portions and the projecting portions.

REFERENCES:
patent: 4534047 (1985-08-01), Deschenaux et al.
patent: 4610020 (1986-09-01), La Fiandra
patent: 5026239 (1991-06-01), Chiba et al.
patent: 5161177 (1992-11-01), Chiba
patent: 5253012 (1993-10-01), Chiba et al.

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