Mask for silicon crystallization, method of forming...

Single-crystal – oriented-crystal – and epitaxy growth processes; – Processes of growth from solid or gel state

Reexamination Certificate

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C117S008000, C438S030000

Reexamination Certificate

active

08052790

ABSTRACT:
A silicon crystallization mask of the present invention includes; a main exposure portion including a plurality of complete light transmission regions which completely transmit light therethrough, and a preliminary exposure portion including a plurality of incomplete light transmission regions, which each partially transmit light therethrough, wherein at least two of the incomplete light transmission regions have different magnitudes of light transmittance from each other.

REFERENCES:
patent: 7384476 (2008-06-01), You
patent: 2005/0142680 (2005-06-01), Ha et al.

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