Mask carrier

Details Mask carrier Mask carrier

2005-11-01

2005-11-01

Nguyen, Kiet T. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

Reexamination Certificate

active

06960772

ABSTRACT:
A carrier for the masks used in Electron Projection Lithography, or other workpieces used in nanotechnology fields, comprises a rectangular frame having a set of four electrostatic chucks in the top surface for holding the mask above a central aperture that has an electron absorber on the bottom for suppressing backscattering; the frame being supported by a bottom carrier that grips the frame with a set of flexures flexible in the z-direction, stiff in an azimuthal direction and flexible in a radial direction.

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patent: 6207555 (2001-03-01), Ross
patent: 6827092 (2004-12-01), Smith et al.

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