Gear cutting – milling – or planing – Milling – Work support
Patent
1983-03-15
1985-10-01
Briggs, William R.
Gear cutting, milling, or planing
Milling
Work support
269 21, 279 1R, 279 4, B23Q 306, B23B 3110
Patent
active
045443114
ABSTRACT:
A mask aligner (10) includes a ring member (11) having an aperture (13) and a series of internal pneumatic cylinders (14-17) having rolling bearing surfaces (19) at the ends of piston rod shafts (18) wherein when a mask (20) is positioned in the aperture, one bearing surface is actuated inwardly to move the mask laterally into engagement with others of said bearing surfaces to rigidly hold and coarse align the mask. Fine accurate alignment in the x, y and .phi. directions are provided by a spaced series of linear motors (40, 41, 42) and a linkage (45) extending between the motor shaft (43) and a rigid post on a fixed support arm (12), the linkage being of sufficient flexibility to bend when the linear motor moves its shaft (43) inwardly to shorten the span between the motor(s) and the rigid post, and of sufficient stiffness to act as a push rod when the linear motor moves its shaft outwardly to lengthen the span between the motor(s) and the rigid post.
REFERENCES:
patent: 2250634 (1941-07-01), Groene
patent: 2451705 (1948-10-01), Adair
patent: 3333274 (1967-07-01), Forcier
patent: 3475097 (1969-10-01), Bishop et al.
patent: 3499640 (1970-03-01), Berz
patent: 3499718 (1970-03-01), Schellenberg
patent: 3711081 (1973-01-01), Cachon
patent: 4410168 (1983-10-01), Gotman
patent: 4428815 (1984-01-01), Powell et al.
patent: 4444492 (1984-04-01), Lee
Briggs William R.
Caserza Steven F.
MacDonald Thomas S.
MacPherson Alan H.
Micronix Partners
LandOfFree
Mask alignment apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Mask alignment apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Mask alignment apparatus will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1439546