Marker structure for optical alignment of a substrate, a...

Details Marker structure for optical alignment of a substrate, a... Marker structure for optical alignment of a substrate, a...

2007-12-21

2009-11-17

Lauchman, L. G (Department: 2877)

Optics: measuring and testing

By alignment in lateral direction

With registration indicia

C356S364000, C356S400000

Reexamination Certificate

active

07619738

ABSTRACT:
A marker structure on a substrate for optical alignment of the substrate includes a plurality of first structural elements and a plurality of second structural elements. In use, the marker structure allows the optical alignment based upon providing at least one light beam directed on the marker structure, detecting light received from the marker structure at a sensor, and determining alignment information from the detected light, the alignment information comprising information relating a position of the substrate to the sensor.

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