Mark position detecting method and device for aligner and aligne

Details Mark position detecting method and device for aligner and aligne Mark position detecting method and device for aligner and aligne

1993-03-17

1995-03-21

Hille, R.

Optics: measuring and testing

By alignment in lateral direction

With registration indicia

250348, G01B 1127, G01B 1100

Patent

active

054001455

ABSTRACT:
Regarding a reflected light from any line portion, which is parallel to the longitudinal direction of the alignment mark 11, on the alignment mark 11, the cylindrical lens 33 functions merely as a glass plate, while the cylindrical lens 34 converges the light onto a pixel on the line sensor 35a, performing optical integration and simplifying image processing. Regarding a reflected light from any line portion, which is parallel to the lateral direction of the alignment mark 11, on the alignment mark 11, the cylindrical lens 34 functions merely as a glass plate, while the cylindrical lens 33 magnifies and forms a line image on the line sensor 35a along the pixel row of that. A toroidal lens can be used in place of the cylindrical lenses 33 and 34.

REFERENCES:
patent: 4601575 (1986-07-01), Tamaki
patent: 4644172 (1987-02-01), Sandland et al.
patent: 5184196 (1993-02-01), Nakagawa et al.
patent: 5189494 (1993-02-01), Muraki
patent: 5222112 (1993-06-01), Teiasawa et al.

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