4. Radiant energy
  5. Inspection of solids or liquids by charged particles
  6. Electron probe type

Masaki Yamabe

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Mark position detecting method and device for aligner and aligne

Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Patent

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Pattern inspection apparatus and electron beam apparatus

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Patent

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Pattern inspection apparatus and electron beam apparatus

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Patent

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Pattern inspection apparatus and electron beam apparatus

Radiant energy – With charged particle beam deflection or focussing – With target means
Patent

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Rotary anode assembly for an X-ray source

X-ray or gamma ray systems or devices – Source – Target
Patent

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Profile ID: LFUS-PAI-P-640813

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