Manufacturing process of thin film transistor

Details Manufacturing process of thin film transistor Manufacturing process of thin film transistor

2006-02-15

2009-06-02

Issac, Stanetta D. (Department: 2812)

Semiconductor device manufacturing: process

Making field effect device having pair of active regions...

On insulating substrate or layer

C438S758000, C438S778000, C257SE21094, C427S255180

Reexamination Certificate

active

07541226

ABSTRACT:
A manufacturing process of a thin film transistor, includes:forming a silicon film of a preset thickness, in which film stress becomes under 2.0×109dyne/cm2in absolute value, on one surface of a transparent substrate; andforming a thin film transistor on other surface of the transparent substrate on which the silicon film is not formed.

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