Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
Reexamination Certificate
2007-10-10
2009-06-09
McPherson, John A. (Department: 1795)
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Making electrical device
C430S320000, C430S945000, C219S121690, C029S025350
Reexamination Certificate
active
07544464
ABSTRACT:
There is disclosed a manufacturing method of a tuning-fork type quartz crystal resonator, in which a simple step can just be added to the existing manufacturing process to prevent generation of short-circuit at a crotch portion and largely improve yield. On a quartz crystal wafer, a metal film is formed on a quartz crystal substrate processed into a tuning-fork form by evaporation or sputtering, the metal film is patterned into desired electrode and wiring line shapes by photolithography/etching, and then a crotch portion30is irradiated with laser from a direction substantially vertical to a wafer surface to remove a non-etched metal film portion in the manufacturing method of the tuning-fork type quartz crystal resonator.
REFERENCES:
patent: 4080696 (1978-03-01), Shimatsu
patent: 5522249 (1996-06-01), Macy
patent: 2005/0115038 (2005-06-01), Umetsu et al.
patent: H08-139337 (1996-05-01), None
patent: 2001-085963 (2001-03-01), None
patent: 2003-133875 (2003-05-01), None
patent: 2005-134364 (2005-05-01), None
Jacobson & Holman PLLC
McPherson John A.
Nihon Dempa Kogyo Co. Ltd.
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