Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
Reexamination Certificate
2006-11-28
2009-06-30
McPherson, John A. (Department: 1795)
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Making electrical device
C430S319000, C430S320000, C430S396000
Reexamination Certificate
active
07553609
ABSTRACT:
There are provided a piezoelectric vibrating piece, which has been more miniaturized and whose efficiency has been more increased, by easily and certainly electrode-dividing an exciting electrode, and a manufacturing method of the same. There is provided a manufacturing method of a piezoelectric vibrating piece, characterized by having an exposure process in which a mask having an opening part is disposed such that the opening part is located on at least either edge of a 1st edge, in two places, formed by a main face and a side face of a vibrating arm part or a 2nd edge, in two places, formed by the main face and a side face of a groove part, and a parallel light is slantingly irradiated through the opening part toward at least either of a bottom face or an outside of the groove part while following a face intersecting perpendicularly to a longitudinal direction of the vibrating arm part to thereby expose a photosensitive film.
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patent: 2005/0006988 (2005-01-01), Kawauchi et al.
patent: 2005/0115038 (2005-06-01), Umetsu et al.
patent: 2006/0130579 (2006-06-01), Dalla Piazza et al.
patent: WO 00/44092 (2000-07-01), None
Brinks Hofer Gilson & Lione
McPherson John A.
Seiko Instruments Inc.
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