Manufacturing method of microstructure, manufacturing method...

Details Manufacturing method of microstructure, manufacturing method... Manufacturing method of microstructure, manufacturing method...

2006-02-28

2006-02-28

Chea, Thorl (Department: 1752)

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Making named article

C369S275100, C369S275400, C369S277000

Reexamination Certificate

active

07005246

ABSTRACT:
Minute structures are obtained by exposing a process target material and changing the shape thereof by relatively shifting a laser beam or electron beam against the process target material and simultaneously repeating irradiation in an intermittent manner. A plurality of minute convex or concave shapes are formed on the process target material by employing a branching element for branching a single beam into a plurality of beams; a parallel element for converting said plurality of beams into beams which respectively advance in parallel; and a condensing element for condensing the plurality of beams to the process target material and generating a plurality of minute spots thereon.

REFERENCES:
patent: 4496216 (1985-01-01), Cowan
patent: 6483639 (2002-11-01), Fujinoki et al.
patent: 6633434 (2003-10-01), Hollander

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