Manufacturing method of laser diode and laser diode array

Details Manufacturing method of laser diode and laser diode array Manufacturing method of laser diode and laser diode array

1992-12-24

1994-11-08

Thomas, Tom

Fishing, trapping, and vermin destroying

437130, 437133, 437972, H01L 2120

Patent

active

053626753

ABSTRACT:
A manufacturing method of a laser diode and a laser diode array is disclosed. A current blocking layer is very thinly grown on the surface of a mesa-like structure provided in a semiconductor substrate due to certain growing characteristics when forming the current blocking layer on the surface of a semiconductor substrate. Therefore, a channel is formed by utilizing the characteristic that GaAs is etched faster than AlGaAs when melt-etched by an unsaturated melted source. A first cladding layer and epitaxial layers are subsequently formed. The channel is easily formed by melt-etching because the current blocking layer is thinly formed on the surface of a reverse mesa-like structure of the semiconductor substrate. Also, a desired operation mode is freely determinable by controlling the Al mole concentration of the current blocking layer. In manufacturing the laser diode and laser diode array, melt-etching for forming the current blocking layers is performed by one epitaxy step. Accordingly, the surface of a mesa-like structure on the substrate is protected from oxidation or defects after melt-etching, thereby improving the production yield and reliability of a given device.

REFERENCES:
patent: 4652333 (1987-03-01), Carney
patent: 4948753 (1990-08-01), Yoshikawa et al.
patent: 4984244 (1991-01-01), Yamamoto et al.
patent: 5023198 (1991-06-01), Strege
patent: 5089437 (1992-02-01), Shima et al.
patent: 5114877 (1992-05-01), Paoli et al.
patent: 5143863 (1992-09-01), Ohnaka et al.
patent: 5192710 (1993-03-01), Schilling

Affiliated with

Also associated with

Rating

Manufacturing method of laser diode and laser diode array does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Manufacturing method of laser diode and laser diode array, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Manufacturing method of laser diode and laser diode array will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1782255