Manufacturing method of ink jet recording head and ink jet...

Details Manufacturing method of ink jet recording head and ink jet... Manufacturing method of ink jet recording head and ink jet...

2004-12-09

2008-12-09

Tran, Binh X (Department: 1792)

Semiconductor device manufacturing: process

Manufacture of electrical device controlled printhead

C029S025350, C029S611000, C029S846000, C216S027000, C216S034000, C216S056000, C347S044000, C347S045000, C347S070000

Reexamination Certificate

active

07462500

ABSTRACT:
A manufacturing method of an ink jet recording head including a discharge port for discharging ink includes the step of forming the discharge port by performing dry etching of a discharge port forming member for forming the discharge port, wherein the discharge port forming member is formed of a Si including resin, and the step of dry etching is performed by using an etching gas including oxygen and chlorine as necessary components.

REFERENCES:
patent: 5458254 (1995-10-01), Miyagawa et al.
patent: 5945260 (1999-08-01), Miyagawa et al.
patent: 6141615 (2000-10-01), Saito et al.
patent: 6484399 (2002-11-01), Aono et al.
patent: 2004/0119789 (2004-06-01), Usami et al.
patent: 2004/0174407 (2004-09-01), Hayakawa et al.
patent: 2004/0238485 (2004-12-01), Hayakawa et al.
patent: 2005/0140737 (2005-06-01), Ushijima et al.
patent: 5-330066 (1993-12-01), None

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