Manufacturing method of a thin film transistor array substrate

Details Manufacturing method of a thin film transistor array substrate Manufacturing method of a thin film transistor array substrate

2006-07-18

2006-07-18

Fourson, George (Department: 2823)

Semiconductor device manufacturing: process

Making field effect device having pair of active regions...

On insulating substrate or layer

C438S158000, C438S701000, C438S713000, C438S951000

Reexamination Certificate

active

07078279

ABSTRACT:
A method of manufacturing a thin film transistor capable of simplifying a substrate structure and a manufacturing process is disclosed. The method of manufacturing a thin film transistor array substrate includes involves a three-round mask process, which includes: forming a gate pattern on a substrate; forming a gate insulating film on the substrate having the gate pattern thereon; forming a source/drain pattern and a semiconductor pattern; forming a passivation film to protect the thin film transistor on an entire surface of the substrate; forming a photo-resist pattern on the passivation film; patterning the passivation film using the photo-resist pattern to form a passivation film pattern; and forming a transparent electrode pattern being extended from a lateral surface of the passivation film pattern and formed at an area except for the passivation film pattern.

REFERENCES:
patent: 5391507 (1995-02-01), Kwasnick et al.
patent: 5527726 (1996-06-01), Possin et al.
patent: 5541128 (1996-07-01), Kwasnick et al.
patent: 6019796 (2000-02-01), Mei et al.
patent: 6156583 (2000-12-01), Hwang
patent: 6653178 (2003-11-01), Tsujimura et al.
patent: 2002/0139983 (2002-10-01), Choi et al.

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