Manufacturing method of a semiconductor integrated circuit

Details Manufacturing method of a semiconductor integrated circuit Manufacturing method of a semiconductor integrated circuit

1996-03-15

1999-01-26

Nguyen, Tuan H.

Semiconductor device manufacturing: process

With measuring or testing

438 18, 382145, H01L 2166

Patent

active

058638075

ABSTRACT:
A method of manufacturing a semiconductor device having a plurality of measuring steps performed by a plurality of measuring equipment comprising the steps of; (a) determining the operational state of each one of the plurality of measuring equipment, (b) selecting and performing a measuring step from the plurality of measuring steps in accordance with the determination made in step (a), and repeating steps (a) and (b) until the plurality of measuring steps is completed.

REFERENCES:
patent: 5665609 (1997-09-01), Mori
patent: 5691648 (1997-11-01), Cheng
patent: 5780317 (1998-07-01), Jun et al.
patent: 5787190 (1998-07-01), Peng et al.

Affiliated with

Also associated with

Rating

Manufacturing method of a semiconductor integrated circuit does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Manufacturing method of a semiconductor integrated circuit, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Manufacturing method of a semiconductor integrated circuit will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1449965