Manufacturing method for short distance wiring layers and...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material

Reexamination Certificate

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C438S626000, C438S627000, C438S629000, C438S637000, C438S638000

Reexamination Certificate

active

07112527

ABSTRACT:
A semiconductor device having regions for forming a plurality of functional blocks and a region for forming wiring layers for connecting the functional blocks, wherein each of the regions for forming the functional blocks includes a multilayer wiring, and the region for forming the wiring layers for connecting adjacent functional blocks includes a coaxial line comprised of a signal line and a ground line surrounding the signal line via an insulating film.

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U.S. Appl. No. 09/986,051, filed Nov. 7, 2001.

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