Manufacturing method and manufacturing apparatus of field...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device

Reexamination Certificate

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C430S315000, C430S317000, C430S318000, C430S319000, C430S321000, C445S024000

Reexamination Certificate

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10730676

ABSTRACT:
A manufacturing method for a field emission display includes the steps of (1) forming a conductive film on a substrate that is to be a base plate, the conductive film being for forming a cathode electrode; (2) applying, on the conductive film, a positive resist, which is a photosensitive material; (3) exposing the positive resist to light, so as to form openings that correspond in a shape of emitters, the light being (a) emitted from a light source, (b) paralleled so that rays thereof have even light intensity distribution, and (c) directed into a micro lens array so as to be condensed in interior of the photosensitive material; and (4) forming the emitters respectively in the openings. This arrangement provides a manufacturing method for a field emission display, the method capable of highly accurately and highly productively sharp emitters aligned orderly, without a complicate manufacturing step and a complicate optical system.

REFERENCES:
patent: 5735721 (1998-04-01), Choi
patent: 6030266 (2000-02-01), Ida et al.
patent: 2003/0017423 (2003-01-01), Hwang et al.
patent: 2003/0124869 (2003-07-01), Huang
patent: 05-275001 (1993-10-01), None
patent: 07-094084 (1995-04-01), None
patent: 09-237565 (1997-09-01), None
patent: 216888/2001 (2001-08-01), None
patent: 124199/2002 (2002-04-01), None

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