Manufacturing management and apparatus for a semiconductor devic

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364403, 364478, G06F 1524, G06F 1546

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active

053750616

ABSTRACT:
A production management method in a production system for semiconductor devices uses processing progress information for each of the plural number of manufacturing apparatus as the basis for performing start allocation of a plural number of next start product groups. When the state of progress has reached a certain stage and is close to the end, a product group of the same type as that which a manufacturing apparatus is processing from amongst start standby product groups is determined as the object of same type priority allocation. A link is made beforehand between that product group and a manufacturing apparatus for which that processing is about to end, and a product group that is an object of same type priority allocation to a manufacturing apparatus that is processing products of that same type, is not started by a manufacturing apparatus that is processing a product of a different type even if that manufacturing apparatus finishes its processing of a product of that different type earlier.

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patent: 4866628 (1989-09-01), Natarajan
patent: 4994980 (1991-02-01), Lee et al.
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