Manufacture of thin film transistor

Details Manufacture of thin film transistor Manufacture of thin film transistor

1983-07-25

1985-04-30

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

29591, 156656, 204 42, 204 383, 427 88, 357 4, 357 11, 430313, 430318, H01L 21312, C23F 102, B44C 122, C03C 1500

Patent

active

045142530

ABSTRACT:
A thin film transistor is disclosed which has an insulator substrate, a gate electrode, a semiconductor layer and a source/drain electrode disposed on the insulator substrate. The source/drain electrode is patterned through a combination of mask deposition technique and photo-lithography technique.

REFERENCES:
patent: 4065781 (1977-12-01), Gutknecht

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