Manufacture of polycrystalline silicon

Details Manufacture of polycrystalline silicon Manufacture of polycrystalline silicon

1980-06-05

1987-07-21

Bernstein, Hiram H.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156DIG73, 427 95, C30B 2510

Patent

active

046816526

ABSTRACT:
Process of growing polysilicon on a plurality of deposition members grouped in a double ring, i.e., an outer circle surrounding an inner circle of members.

REFERENCES:
patent: 3147141 (1964-09-01), Ishizuka
patent: 3328199 (1967-06-01), Sirtl
patent: 3594227 (1971-07-01), Oswald
patent: 3911194 (1975-10-01), Dejachy et al.
patent: 4150168 (1979-04-01), Yatsurugi et al.
patent: 4155781 (1979-05-01), Diepers

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