Manufacture of integrated fluidic devices

Details Manufacture of integrated fluidic devices Manufacture of integrated fluidic devices

2001-04-27

2003-08-05

Utech, Benjamin L. (Department: 1765)

Semiconductor device manufacturing: process

Chemical etching

Combined with coating step

C438S700000, C438S720000, C438S756000

Reexamination Certificate

active

06602791

ABSTRACT:

BACKGROUND OF THE INVENTION
1. Field of the Invention
This invention relates to the field of integrated device fabrication, and more particularly to the manufacture of integrated devices for use in microfluidics applications, such biological applications; in the latter case such devices are often known as biochips. Biochips require the fabrication of micro-channels for the processing of biological fluids, and the present invention relates a method of fabricating such channels.
2. Description of the Prior Art
The prior art is generally divided into two types of device: Passive and Active. Both types include microchannels for the transport of biological fluids. In passive devices all the control circuitry for fluid flow is on external circuitry. Active devices include control circuitry incorporated directly into the biochip.
The following granted U.S.A. Patents show the Prior Art concerning the fabrication of micro-channel biochips for the processing of biological fluids: U.S. Pat. No. 6,186,660, “Microfluidic systems incorporating varied channel dimensions”; U.S. Pat. No. 6,180,536, “Suspended moving channels and channel actuators for . . . ”; U.S. Pat. No. 6,174,675, “Electrical current for controlling fluid parameters in . . . ”; U.S. Pat. No. 6,172,353, “System and method for measuring low power signals”; U.S. Pat. No. 6,171,865, “Simultaneous analyte determination and reference balancing . . . ; U.S. Pat. No. 6,171,850, “Integrated devices and systems for performing temperature . . . ”; U.S. Pat. No. 6,171,067, “Micropump”; U.S. Pat. No. 6,170,981, “In situ micromachined mixer for microfluidic analytical . . . ”; U.S. Pat. No. 6,167,910, “Multi-layer microfluidic devices”; U.S. Pat. No. 6,159,739, “Device and method for 3-dimensional alignment of particles . . . ”; U.S. Pat. No. 6,156,181, “Controlled fluid transport microfabricated polymeric substrates”; U.S. Pat. No. 6,154,226, “Parallel print array”; U.S. patent No. substrates”; U.S. Pat. No. 6,154,226, “Parallel print array”; U.S. Pat. No. 6,153,073, “Microfluidic devices incorporating improved channel . . . ”; U.S. Pat. No. 6,150,180, “High throughput screening assay systems in microscale . . . ”; U.S. Pat. No. 6,150,119, “Optimized high-throughput analytical system ”; U.S. Pat. No. 6,149,870, “Apparatus for in situ concentration and/or dilution of . . . ”; U.S. Pat. No. 6,149,787, “External material accession systems and methods”; U.S. Pat. No. 6,148,508, “Method of making a capillary for electrokinetic transport of . . . ”; U.S. Pat. No. 6,146,103, “Micromachined magnetohydrodynamic actuators and sensors ”; U.S. Pat. No. 6,143,248, “Capillary microvalve”; U.S. Pat. No. 6,143,152, “Microfabricated capillary array electrophoresis device and . . . ”; U.S. Pat. No. 6,137,501, “Addressing circuitry for microfluidic printing apparatus”; U.S. Pat. No. 6,136,272, “Device for rapidly joining and splitting fluid layers”; U.S. Pat. No. 6,136,212, “Polymer-based micromachining for microfluidic devices”; U.S. Pat. No. 6,132,685, “High throughput microfluidic systems and methods”; U.S. Pat. No. 6,131,410, “Vacuum fusion bonding of glass plates”; U.S. Pat. No. 6,130,098, “Moving microdroplets”; U.S. Pat. No. 6,129,854, “Low temperature material bonding technique”; U.S. Pat. No. 6,129,826, “Methods and systems for enhanced fluid transport”; U.S. Pat. No. 6,126,765, “Method of producing microchannel/microcavity structures”; U.S. Pat. No. 6,126,140, “Monolithic bi-directional microvalve with enclosed drive . . . ”; U.S. Pat. No. 6,123,798, “Methods of fabricating polymeric structures incorporating . . . ”; U.S. Pat. No. 6,120,666, “Microfabricated device and method for multiplexed . . . ”; U.S. Pat. No. 6,118,126, “Method for enhancing fluorescence”; U.S. Pat. No. 6,107,044, “Apparatus and methods for sequencing nucleic acids in . . . ”; U.S. Pat. No. 6,106,685, “Electrode combinations for pumping fluids”; U.S. Pat. No. 6,103,199, “Capillary electroflow apparatus and method”; U.S. Pat. No. 6,100,541, “Microfluidic devices and systems incorporating integrated . . . ”; U.S. Pat. No. 6,096,656, “Formation of microchannels from low-temperature . . . ”; U.S. Pat. No. 6,091,502, “Device and method for performing spectral measurements in . . . ”; U.S. Pat. No. 6,090,251, “Microfabricated structures for facilitating fluid introduction . . . ”; U.S. Pat. No. 6,086,825, “Microfabricated structures for facilitating fluid introduction . . . ”; U.S. Pat. No. 6,086,740. “Multiplexed microfluidic devices and systems”; U.S. Pat. No. 6,082,140, “Fusion bonding and alignment fixture ”; U.S. Pat. No. 6,080,295, “Electropipettor and compensation means for electrophoretic . . . ”; U.S. Pat. No. 6,078,340, “Using silver salts and reducing reagents in microfluidic printing”; U.S. Pat. No. 6,074,827, “Microfluidic method for nucleic acid purification and processing”; U.S. Pat. No. 6,074,725, “Fabrication of microfluidic circuits by printing techniques”; U.S. Pat. No. 6,073,482, “Fluid flow module”; U.S. Pat. No. 6,071,478, “Analytical system and method”; U.S. Pat. No. 6,068,752, “Microfluidic devices incorporating improved channel . . . ”; U.S. Pat. No. 6,063,589, “Devices and methods for using centripetal acceleration to . . . ”; U.S. Pat. No. 6,062,261, “MicrofluIdic circuit designs for performing electrokinetic . . . ”; U.S. Pat. No. 6,057,149, “Microscale devices and reactions in microscale devices”; U.S. Pat. No. 6,056,269, “Microminiature valve having silicon diaphragm”; U.S. Pat. No. 6,054,277, “Integrated microchip genetic testing system”; U.S. Pat. No. 6,048,734, “Thermal microvalves in a fluid flow method”; U.S. Pat. No. 6,048,498, “Microfluidic devices and systems”; U.S. Pat. No. 6,046,056, “High throughput screening assay systems in microscale . . . ”; U.S. Pat. No. 6,043,080, “Integrated nucleic acid diagnostic device ”; U.S. Pat. No. 6,042,710, “Methods and compositions for performing molecular separations”; U.S. Pat. No. 6,042,709, “Microfluidic sampling system and methods”; U.S. Pat. No. 6,012,902, “Micropump”; U.S. Pat. No. 6,011,252, “Method and apparatus for detecting low light levels”; U.S. Pat. No. 6,007,775, “Multiple analyte diffusion based chemical sensor”; U.S. Pat. No. 6,004,515, “Methods and apparatus for in situ concentration and/or . . . ”; U.S. Pat. No. 6,001,231, “Methods and systems for monitoring and controlling fluid . . . ”; U.S. Pat. No. 5,992,820, “Flow control in microfluidics devices by controlled bubble . . . ”; U.S. Pat. No. 5,989,402, “Controller/detector interfaces for microfluidic systems”; U.S. Pat. No. 5,980,719, “Electrohydrodynamic receptor”; U.S. Pat. No. 5,972,710, “Microfabricated diffusion-based chemical sensor”; U.S. Pat. No. 5,972,187, “Electropipettor and compensation means for electrophoretic bias”; U.S. Pat. No. 5,965,410, “Electrical current for controlling fluid parameters in . . . ”; U.S. Pat. No. 5,965,001, “Variable control of electroosmotic and/or electrophoretic . . . ”; U.S. Pat. No. 5,964,995, “Methods and systems for enhanced fluid transport”; U.S. Pat. No. 5,958,694, “Apparatus and methods for sequencing nucleic acids in . . . ”; U.S. Pat. No. 5,958,203, “Electropipettor and compensation means for electrophoretic bias”; U.S. Pat. No. 5,957,579, “Microfluidic systems incorporating varied channel dimensions”; U.S. Pat. No. 5,955,028, “Analytical system and method”; U.S. Pat. No. 5,948,684, “Simultaneous analyte determination and reference balancing . . . ”; U.S. Pat. No. 5,948,227, “Methods and systems for performing electrophoretic . . . ”; U.S. Pat. No. 5,942,443, “High throughput screening assay systems in microscale”; U.S. Pat. No. 5,932,315, “Microfluidic structure assembly with mating microfeatures”; U.S. Pat. No. 5,932,100, “Microfabricated differential extraction device and method . . . ”; U.S. Pat. No. 5,922,604, “Thin reaction chambers for containing and handling liquid . . . ”; U.S. Pat. No. 5,922,210, “Tangential flow planar microfabricated fluid filter and method . . . ”; U.S. Pat. No. 5,885,470, “Controlled fluid transport in microfabricated polymeric . . . ”; U.S. Pat. No. 5,88

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