Valves and valve actuation – Fluid actuated or retarded – Piston type expansible chamber reciprocating valve actuator
Reexamination Certificate
2011-07-26
2011-07-26
Fristoe, Jr., John K (Department: 3753)
Valves and valve actuation
Fluid actuated or retarded
Piston type expansible chamber reciprocating valve actuator
C029S890131, C029S840000, C251S368000
Reexamination Certificate
active
07984891
ABSTRACT:
A space-conserving integrated fluid delivery system which is particularly useful for gas distribution in semiconductor processing equipment. The fluid delivery system includes an integrated fluid flow network architecture, which may include, in addition to a layered substrate containing fluid flow channels, various fluid handling and monitoring components. The layered substrate is diffusion bonded, and the various fluid handling and monitoring components may be partially integrated or fully integrated into the substrate, depending on design and material requirements.
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Crockett Mark
DeChellis Michael J.
Khullar Aneesh
Lane John W.
Melcer Chris
Applied Materials Inc.
Church, Esq. Shirley L.
Fristoe, Jr. John K
Rost Andrew J
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