Manufacture of a suspended micromechanical element

Details Manufacture of a suspended micromechanical element Manufacture of a suspended micromechanical element

1991-07-03

1992-09-29

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156656, 1566591, 156662, B44C 122, C03C 1500, C23F 100, H01L 21306

Patent

active

051511533

ABSTRACT:
A process in which concave surfaces to form undercut edges can be made and the application of such process to making micromechanical devices. Concave surfaces forming undercut edges are made in a wall of a stationary structure extending from a planar surface by growing a convex bumper into the wall. The bumper forms a convexo-concave relationship with the wall. The bumper is then removed from the wall in such a manner as to preserve the concave, undercut surface of the wall. The stationary structure and the planar surface is then further processed by coating with a sacrificial layer, and a structural layer. The structural layer is patterned into a movable structure that is held onto the stationary structure by the curved, undercut edge such as the slot in a slider. Final processing includes removing the sacrificial layer to free the movable structure from the stationary structure.

REFERENCES:
patent: 4740410 (1988-04-01), Muller et al.
patent: 4997521 (1991-03-01), Howe et al.
patent: 5043043 (1991-08-01), Howe et al.

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