Manufacture of a micromechanical element with two degrees of fre

Details Manufacture of a micromechanical element with two degrees of fre Manufacture of a micromechanical element with two degrees of fre

1991-07-03

1993-05-11

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156653, 156656, 156657, 1566591, 156662, 437228, 437233, 437238, 437241, H01L 21306, B44C 122, C03C 1500, C23F 100

Patent

active

052098184

ABSTRACT:
A method of fabricating a micromechanical structure of a rod enclosed by a casing and able to both slide and rotate in the casing is described. The rod is formed on a substrate by growing a cylinder into a wall. The wall is then removed leaving the cylinder. The cylinder is coated with a sacrificial layer and a structural layer. The structural layer is patterend to form the casing and the sacrificial layer is removed.

REFERENCES:
patent: 4740410 (1988-04-01), Muller et al.
patent: 4997521 (1991-03-01), Howe et al.
patent: 5043043 (1991-08-01), Howe et al.

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