Stock material or miscellaneous articles – Composite – Of inorganic material
Reexamination Certificate
2008-09-27
2010-11-09
Kunemund, Robert M (Department: 1714)
Stock material or miscellaneous articles
Composite
Of inorganic material
C117S944000, C117S956000, C428S689000, C428S336000, C428S697000, C428S699000, C428S701000, C428S702000
Reexamination Certificate
active
07829207
ABSTRACT:
A manufacture method that can manufacture ZnO based compound semiconductor crystal of good quality. A ZnO substrate is prepared to have a principal surface made of a plurality of terraces of (0001) planes arranged stepwise along an m-axis direction, the envelop of the principal surface being inclined relative to the (0001) plane by about 2 degrees or less. ZnO based compound semiconductor crystal is grown on the principal surface.
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Cho Meoung Whan
Kato Hiroyuki
Maeda Katsumi
Sano Michihiro
Yao Takafumi
Chen Yoshimura LLP
Kunemund Robert M
Rao G. Nagesh
Stanley Electric Co. Ltd.
Tohoku University
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