Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Reexamination Certificate
2005-05-03
2005-05-03
Wilson, Allan R. (Department: 2815)
Active solid-state devices (e.g., transistors, solid-state diode
Field effect device
Having insulated electrode
C257S288000, C257S368000, C257S377000, C257S384000, C257S330000, C257S332000, C257S333000, C257S334000, C257S321000
Reexamination Certificate
active
06888183
ABSTRACT:
After a MOS type transistor is formed on the surface of a semiconductor substrate, an interlayer insulating film covering the transistor is formed. The insulating film includes a silicon oxide film made of hydrogen silsesquioxane resin in a ceramic state. After a wiring layer is formed on the insulating film, a silicon oxide film as a surface protection film is formed on the insulating film, covering the wiring layer. In order to reduce process damages, heat treatment is performed 30 minutes at 400° C. in a nitrogen gas atmosphere. With this heat treatment, hydrogen in the silicon oxide film is released and diffuses into the channel region of the transistor to lower interfacial energy levels. Since the silicon nitride film does not transmit hydrogen, it is not necessary for the heat treatment atmosphere to contain hydrogen. A variation in threshold voltages of MOS type transistors can be easily lowered.
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Japanese Office Action issued Jul. 4, 2000.
English-language concise explanationof relevance of the threee Japanese-language documents listed herein.
Technical Report of the Institute of Electronics, Information and Communication Engineers, vol. 97, No. 508, SDM97-181, Jan. 23, 1998, pp. 25-32.
Dickstein Shapiro Morin & Oshinsky LLP.
Ortiz Edgardo
Wilson Allan R.
Yamaha Corporation
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