Manufacture method for micromechanical devices

Details Manufacture method for micromechanical devices Manufacture method for micromechanical devices

1995-06-07

2000-08-08

Spyrou, Cassandra

Optical: systems and elements

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359291, 359226, 359873, G02B 7182

Patent

active

060991321

ABSTRACT:
A process for manufacturing micromechanical devices. The process includes the step of covering the activation circuitry (201) and those parts of the device that come in contact with moving parts with a pad film (202). The pad film prevents frictional wear and sticking of the moving parts, and can prevent electrical shorts between different parts of the activation circuitry. Additionally, the pad film can prevent particulates from interfering with the operation of the device.

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patent: 4970106 (1990-11-01), DiStefano et al.
patent: 5083857 (1992-01-01), Hornbeck
patent: 5099353 (1992-03-01), Hornbeck
patent: 5142405 (1992-08-01), Hornbeck
patent: 5227013 (1993-07-01), Kumar
patent: 5298114 (1994-03-01), Takeshita
patent: 5447600 (1995-09-01), Webb

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