Manufacture method for micromechanical devices

Details Manufacture method for micromechanical devices Manufacture method for micromechanical devices

1994-09-23

2000-04-25

Spyrou, Cassandra

Optical: systems and elements

Mirror

With support

359871, 359291, 359295, 359224, G02B 7182

Patent

active

060536179

ABSTRACT:
A process for manufacturing micromechanical devices. The process includes the step of covering the activation circuitry (201) and those parts of the device that come in contact with moving parts with a pad film (202). The pad film prevents frictional wear and sticking of the moving parts, and can prevent electrical shorts between different parts of the activation circuitry. Additionally, the pad film can prevent particulates from interfering with the operation of the device.

REFERENCES:
patent: 4293377 (1981-10-01), Miyajima
patent: 4970106 (1990-11-01), DiStefano et al.
patent: 5083857 (1992-01-01), Hornbeck
patent: 5099353 (1992-03-01), Hornbeck
patent: 5142405 (1992-08-01), Hornbeck
patent: 5227013 (1993-07-01), Kumar
patent: 5298114 (1994-03-01), Takeshita
patent: 5447600 (1995-09-01), Webb

Affiliated with

Also associated with

Rating

Manufacture method for micromechanical devices does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Manufacture method for micromechanical devices, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Manufacture method for micromechanical devices will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-988172