Manipulator having thermally conductive rotary joint for transfe

Radiant energy – Inspection of solids or liquids by charged particles – Analyte supports

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414217, G01N 2100

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active

045380686

ABSTRACT:
A manipulator for rotatably moving a test specimen in an ultra-high vacuum chamber includes a translational unit movable in three mutually perpendicular directions. A manipulator frame is rigidly secured to the translational unit for rotatably supporting a rotary shaft. A first copper disc is rigidly secured to an end of the rotary shaft for rotary movement within the vacuum chamber. A second copper disc is supported upon the first disc. The second disc receives a cryogenic cold head and does not rotate with the first disc. A sapphire plate is interposed between the first and second discs to prevent galling of the copper material while maintaining high thermal conductivity between the first and second discs. A spring is disposed on the shaft to urge the second disc toward the first disc and compressingly engage the interposed sapphire plate. A specimen mount is secured to the first disc for rotation within the vacuum chamber. The specimen maintains high thermal conductivity with the second disc receiving the cryogenic transfer line.

REFERENCES:
patent: 2498479 (1950-02-01), Bensen
patent: 2602899 (1952-07-01), Page
patent: 2829261 (1958-04-01), Lowitzsch et al.
patent: 3214972 (1965-11-01), Pax
patent: 3599475 (1971-08-01), Dubouch
patent: 3909207 (1975-09-01), Bir
patent: 3969314 (1976-07-01), Grigull
patent: 4284894 (1981-08-01), Sitte et al.

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