Radiant energy – Inspection of solids or liquids by charged particles – Analyte supports
Reexamination Certificate
2006-05-09
2006-05-09
Lee, John R. (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Analyte supports
Reexamination Certificate
active
07041985
ABSTRACT:
Manipulators for handling micron-scale samples, methods for making probes for the manipulators, and methods for using the manipulators are provided. An exemplary manipulator includes a probe, a probe holder, and a mechanical positioner. The probe includes an electrically conductive surface, a proximal end and a distal end where the distal end has a truncated conical shape with a generally flat face, and a bore extending from the proximal end to the face. The probe holder engages the proximal end and includes an inlet in fluid communication with the bore and with a source of sub-ambient pressure. An exemplary microscopy inspection method includes forming a free-standing membrane, positioning the probe of the manipulator proximate to the membrane, drawing the membrane to the face by drawing a vacuum through the bore, placing the membrane on a sample support, and inspecting the membrane with a microscope.
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Declaration of Haifeng Wang Under 37 C.F.R. § 1.56(a), dated Nov. 1, 2004, 2 pages.
Vinh Loc
Wang Haifeng
Carr & Ferrell LLP
Harrison, Esq. Joshua C.
Lee John R.
Western Digital (Fremont) Inc.
Yantomo Jennifer
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