Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2005-08-16
2005-08-16
Rutledge, D. (Department: 2851)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S077000, C250S492200, C430S005000, C430S030000, C430S311000
Reexamination Certificate
active
06930757
ABSTRACT:
There is disclosed a managing method of an exposure apparatus comprising selecting one or more exposure apparatuses out of a plurality of the exposure apparatuses for each a predetermined partial exposure area, whose dimensional differences of each an exposed pattern among the exposure apparatuses are within a predetermined permissible range in each the predetermined partial exposure area in a whole of an exposure area which is the exposed patterns are transferred using the exposure apparatuses, and managing the exposure apparatuses which are selected for each the predetermined partial exposure area, as a group of the exposure apparatuses, by grouping the exposure apparatuses for each the predetermined partial exposure area.
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patent: 6444375 (2002-09-01), Nam et al.
patent: 2003/0037309 (2003-02-01), Utsunomiya
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Fukuhara Kazuya
Sato Takashi
Finnegan Henderson Farabow Garrett & Dunner L.L.P.
Rutledge D.
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