Management system of semiconductor fabrication apparatus,...

Details Management system of semiconductor fabrication apparatus,... Management system of semiconductor fabrication apparatus,...

2007-03-28

2010-06-22

Shechtman, Sean P (Department: 2121)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C700S029000, C700S033000, C700S051000, C700S121000, C438S005000, C702S084000, C702S183000

Reexamination Certificate

active

07742834

ABSTRACT:
According to the present, there is proved a semiconductor fabrication apparatus management system having:a sensor which monitors and outputs a plurality of apparatus parameters of a semiconductor fabrication apparatus which fabricates a semiconductor device;a measurement unit which measures a dimensional value of the semiconductor device, and outputs the dimensional value as dimensional data;an apparatus parameter storage unit which stores the apparatus parameters;a dimensional data storage unit which stores the dimensional data;an apparatus parameter controller which calculates predicted dimensional data by extracting the dimensional data from the dimensional data storage unit, and controls at least one of the plurality of apparatus parameters on the basis of the predicted dimensional data; andan abnormality factor extraction unit which analyzes correlations between the controlled apparatus parameter and other apparatus parameters, and extracts an abnormal apparatus parameter on the basis of a calculated correlation coefficient.

REFERENCES:
patent: 5646870 (1997-07-01), Krivokapic et al.
patent: 5659467 (1997-08-01), Vickers
patent: 7127358 (2006-10-01), Yue et al.
patent: 7151976 (2006-12-01), Lin
patent: 2004/0255198 (2004-12-01), Matsushita et al.
patent: 2005/0194590 (2005-09-01), Matsushita et al.
patent: 2004-186445 (2004-07-01), None

Affiliated with

Also associated with

Rating

Management system of semiconductor fabrication apparatus,... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Management system of semiconductor fabrication apparatus,..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Management system of semiconductor fabrication apparatus,... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4164211