Coherent light generators – Particular active media – Gas
Patent
1996-02-12
1997-07-08
Healy, Brian
Coherent light generators
Particular active media
Gas
372 25, 372 57, 372 61, H01S 322
Patent
active
056469543
ABSTRACT:
A diagnostic sub-routine for use by the control system of a gas discharge laser is disclosed. The sub-routine provides a prediction of the time remaining, based upon real-time laser system operations, for each pulse-limited sub-system within the laser. The sub-routine utilizes a calculated average pulse repetition rate over a user-defined time interval as the basis for predicting the time remaining, under current operating conditions, until the end-of-life for each pulse-limited sub-system; and continually updates the time prediction to account for changes in the lasers operation. The predicted time is reported to the operator to allow advanced scheduling of routine maintenance.
REFERENCES:
patent: 3899750 (1975-08-01), Hochuli
patent: 4429392 (1984-01-01), Yoshida et al.
patent: 4716569 (1987-12-01), Bees
patent: 4740982 (1988-04-01), Hakuta et al.
patent: 4763336 (1988-08-01), Stephens
patent: 4977573 (1990-12-01), Bittenson et al.
patent: 5090020 (1992-02-01), Bedwell
patent: 5260961 (1993-11-01), Zhou et al.
patent: 5377215 (1994-12-01), Das et al.
patent: 5440578 (1995-08-01), Sandstrom
Das Palash P.
Stephenson Gary R.
Cymer Inc.
Healy Brian
Power David J.
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