Maintaining flow rate of a fluid

Details Maintaining flow rate of a fluid Maintaining flow rate of a fluid

2007-12-27

2011-10-18

Rivell, John (Department: 3753)

Fluid handling

Processes

With control of flow by a condition or characteristic of a...

C137S206000, C137S209000, C137S263000

Reexamination Certificate

active

08037894

ABSTRACT:
A pressure gauge may be coupled to a supply line which carries liquid from a bottle to either one or more mixing vessels and/or one or more reactors in a combinatorial processing tool. A control device may monitor the pressure measured by the pressure gauge, and the control device may be configured to change the pressure supplied to the bottle based on a comparison of the measured pressure to a pre-determined pressure value. The control device may adjust the pressure provided to the bottle using a pressure regulator coupled to the pressure source. By changing the pressure provided to the bottle, the control device may maintain a relatively constant flow rate of fluids from the liquid source into one or more mixing vessels and/or the one or more reactors.

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