Valves and valve actuation – Pivoted valves
Patent
1995-05-16
1996-10-01
Nguyen, Hoang
Valves and valve actuation
Pivoted valves
251266, 2513353, 25112911, F16K 116, F16K 3102
Patent
active
055605869
ABSTRACT:
A bridge-type main valve located at a connecting outlet between a vacuum chamber and a main vacuum pump, and having a rod of an electric cylinder driven by a stepper motor connected to a valve seat for opening and dosing the connecting outlet so that the driving direction and a closing surface of the valve seat form a right angle. A piston may be attached to the rod, and a cylindrical housing fitted in the piston so that the piston and the cylindrical housing form a pressurized air pumping chamber for moving the rod and the valve seat in the outlet closing direction. The valve can achieve fine pressure adjustment without any variable orifice by stopping a valve seat at an arbitrary (not stepwise) position.
REFERENCES:
patent: 2767923 (1956-10-01), Matthews
patent: 3774462 (1973-11-01), Thompson
patent: 4993474 (1985-01-01), Ohyama
patent: 5226632 (1993-07-01), Tepman et al.
patent: 5318272 (1994-06-01), Smith
patent: 5363872 (1994-11-01), Lorimer
Aruga Yoshiki
Suzuki Naoyuki
Anelva Corporation
Manzo Edward D.
Murphy Mark J.
Nguyen Hoang
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